Advanced Workshop Series

"Micro Analytical Techniques for the Characterisation of Surface Contamination and Materials"

• Date :	17th June (Thursday) to 18th June (Friday) 2010
  Time :	9.00am – 5.00pm
  Duration :	Two days
  Venue :	Customer Support Centre Shimadzu (Asia Pacific) Pte Ltd 79 Science Park Drive, #02-01/08, Cintech IV Singapore 118264


Introduction
The yield, quality and reliability of Semiconductor Devices are greatly affected by the properties and surface conditions of the materials used, and the impurities that may be un-intentionally sneaked in during the processing. As devices are getting miniaturized, more advanced micro-analytical tools are part of the essential support to enable the understanding of the problems, hence, a more rational solution to improve the overall process. Surface techniques such as Auger Electron Spectroscopy (AES), Electron Spectroscopy for Chemical Analysis (ESCA), time-of-flight Secondary Mass Spectroscopy ( TOF-SIMS) are presented, with case studies. For the completion of the materials characterization, peudo-surface techniques (EDX and WDX) are also introduced as complementary and essential tools.


• Come to the workshop and you will :
  

  •	Enhance your knowledge of analytical methods
  •	Understand how these methods can help problems solving and new product development
  •	Understand the selection of effective analytical method(s) to get the maximum return of the analysis
  •	Understand the impact of surface conditions (chemistry and contaminants)

For more information, please click here for the workshop details.(.pdf)

We look forward to your participation. Thank you.


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Registration Fee : SGD$500.00 (inclusive of 7% GST ) per participant.
Pre-registration for the workshop is necessary. Seats are available on a first-come-first serve basis.
Please register before 7th June 2010.